JPS6329127B2 - - Google Patents

Info

Publication number
JPS6329127B2
JPS6329127B2 JP56147523A JP14752381A JPS6329127B2 JP S6329127 B2 JPS6329127 B2 JP S6329127B2 JP 56147523 A JP56147523 A JP 56147523A JP 14752381 A JP14752381 A JP 14752381A JP S6329127 B2 JPS6329127 B2 JP S6329127B2
Authority
JP
Japan
Prior art keywords
base member
floating base
frequency vibrator
floating
reference member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56147523A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5850315A (ja
Inventor
Toshasu Nakayuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14752381A priority Critical patent/JPS5850315A/ja
Publication of JPS5850315A publication Critical patent/JPS5850315A/ja
Publication of JPS6329127B2 publication Critical patent/JPS6329127B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP14752381A 1981-09-16 1981-09-16 高速高精度浮動装置 Granted JPS5850315A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14752381A JPS5850315A (ja) 1981-09-16 1981-09-16 高速高精度浮動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14752381A JPS5850315A (ja) 1981-09-16 1981-09-16 高速高精度浮動装置

Publications (2)

Publication Number Publication Date
JPS5850315A JPS5850315A (ja) 1983-03-24
JPS6329127B2 true JPS6329127B2 (en]) 1988-06-13

Family

ID=15432237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14752381A Granted JPS5850315A (ja) 1981-09-16 1981-09-16 高速高精度浮動装置

Country Status (1)

Country Link
JP (1) JPS5850315A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0356922U (en]) * 1989-10-06 1991-05-31

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0637892B2 (ja) * 1983-10-24 1994-05-18 キヤノン株式会社 スライダ
JPS62250200A (ja) * 1986-04-23 1987-10-31 Kawasaki Steel Corp オ−ステナイト系ステンレス鋼板の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3359045A (en) * 1966-05-20 1967-12-19 Bendix Corp Squeeze film bearing
US3471205A (en) * 1966-07-05 1969-10-07 Bendix Corp Squeeze film bearings

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0356922U (en]) * 1989-10-06 1991-05-31

Also Published As

Publication number Publication date
JPS5850315A (ja) 1983-03-24

Similar Documents

Publication Publication Date Title
US5524502A (en) Positioning apparatus including a hydrostatic bearing for spacing apart a supporting surface and a guide surface
KR0166987B1 (ko) 자중지지장치
JP3107933B2 (ja) 振動波駆動装置および振動波駆動装置を備えた装置
US3339421A (en) Dynamic gas film supported inertial instrument
JPH02111271A (ja) Ｘ−ｙステージ
JPS6329127B2 (en])
JPS63244205A (ja) 位置決め装置
JPS61224883A (ja) 振動波モ−タ
US3359045A (en) Squeeze film bearing
JP2780817B2 (ja) 精密ステージ装置
US3433538A (en) Dynamic gas film bearing structure
JP3143582B2 (ja) 静圧軸受装置およびこれを用いた位置決めステージ
JPH08170636A (ja) リニアガイドユニット
JPS61159349A (ja) 微小変位移動装置
JPH0321765B2 (en])
JPH0228010B2 (en])
SU851561A1 (ru) Вибродвигатель
US3054076A (en) Potentiometer
SU1509565A1 (ru) Газовый подшипник
JPS6377687A (ja) 送り機構の発塵防止装置
JPH0724658Y2 (ja) 微動機構
JP2024104556A (ja) 駆動装置、駆動方法
JP3027165B2 (ja) 位置決め装置
JP2643115B2 (ja) リニアモータ
JP2008144918A (ja) スクイーズ空気軸受およびそれを用いた位置決め案内装置